
The Integrated Inline Defect Inspection System for Perovskite Photovoltaics is designed for quality control in the continuous production of large-area thin films, cells, and modules. Integrating photoluminescence (PL), electroluminescence (EL), and automated optical inspection (AOI), the inline system supports both line-scan and area-scan imaging and can be configured to suit sample dimensions, process stages, and production cycle times, enabling full-area inspection at critical manufacturing stages. By analyzing luminescence intensity and spatial distribution alongside bright- and dark-field images, the system identifies film nonuniformity, dark spots, cracks, surface anomalies, and localized electrical failures. AI algorithms provide defect annotation, classification, and statistical analysis, while defect tracking across process stages helps identify where abnormalities originate. These capabilities support efforts to prevent defective products from progressing to subsequent operations, improve batch-to-batch consistency, and optimize manufacturing processes.
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