The GaN Substrate Defect Inspection System uses non-destructive optical inspection to identify and characterize defects in gallium nitride (GaN) substrates, supporting material quality evaluation and process development. Compatible with 2-, 4-, and 6-inch GaN substrates, the system detects a range of defects, including threading dislocations, stacking faults, inversion domains, grain boundaries, V-pits, voids, and cracks, helping users understand defect types and their distribution across the substrate.
Inquire