The SL-9000 is a non-destructive optical defect inspection system for compound semiconductor substrates. Designed primarily for indium phosphide (InP) substrates, it can also be adapted to inspect gallium arsenide (GaAs) substrates. The system images and maps threading dislocations and other lattice defects in both conductive and semi-insulating substrates, providing data for substrate quality assessment and process optimization.
The SL-9000 features an AI analysis system and can incorporate information on surface defects, including scratches, particles, and contamination, into substrate quality assessments. Its efficient, non-destructive inspection capabilities support the development, manufacturing, and quality control of compound semiconductor substrates.
The SL-9000 features an AI analysis system and can incorporate information on surface defects, including scratches, particles, and contamination, into substrate quality assessments. Its efficient, non-destructive inspection capabilities support the development, manufacturing, and quality control of compound semiconductor substrates.
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