DISPEC-8000 SiC Substrate/Seed/Boule 3 in 1 Dislocation Defect Inspection System
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DISPEC-8000 SiC Substrate/Seed/Boule 3 in 1 Dislocation Defect Inspection System

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Precise and isolate identification of TSD/TED/BPD/SF in one scan
Single processing chuck for any thickness and size (4-10”) 
Optical non-destructive methodology
High contrast, high resolution imaging
Advanced review and annotation software
Inspection Speed: 17min/6”wafer (avg.)

 
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